According to VTT, the technology could realise zero power autonomous devices required for the IoT. For the first time, it adds, silicon based micro-supercapacitors can compete with carbon and graphene based devices in terms of power, energy and durability.
The energy and power density of a supercapacitor depends on the surface area and conductivity of the solid electrodes. VTT’s research group has developed a hybrid nanomaterial electrode, which consists of porous silicon coated with a few nanometres of titanium nitride laid down by atomic layer deposition, creating a large conductive surface in a small volume.
VTT’s research group says it has taken integration to the extreme by including micro-supercapacitor energy storage in a chip. It says the device can store up to 0.2J and generate up to 2W when installed in a 1cm2 chip.
VTT is now looking for a partner to help commercialise the technique.