The NPC-D-5200 incorporates a precision capacitive measurement circuit and is updated with the stage position 120,000 times per second, delivering high positional accuracy at speed. It has a power rating of -30 to 150V drive with a 160mA continuous current, giving it the capacity to address a spectrum of alignment and metrology applications. By employing proprietary low noise technology, stage position noise is said to have been reduced so that in the majority of implementations it measures a few tens of a picometre.
The NPC-D-5200 controller measures 268 x 194 x 70mm and weighs 1.7kg. It incorporates serial, USB 2.0 and Ethernet interfaces, so that connectivity options are not restricted and system flexibility is maximised. The unit has an operational temperature range that covers 10 to 40°C.
