Partnership aims to fuel MEMS innovation

The companies have agreed to distribute xenon difluoride (XeF₂), a highly selective and directional etchant of silicon, which enables complex structures to be created quickly, uniformly and at the small sizes required for integration into almost any device. "This partnership is just one component of our continued investment in advanced materials," said Peter Owen, head of Linde's Global Electronics business. "The addition of XeF₂ complements our existing portfolio of gases that help electronics manufacturers globally produce more innovative electronic devices more cost effectively."