While the Lab4MEMS project focused on developing a pilot line for next generation MEMS devices augmented with such technologies as piezoelectric or magnetic materials and 3D packaging, Lab4MEMS II will integrate mechanical, optical and electrical systems to enable the sensing or manipulation of optical signals.
Roberto Zafalon, ST's European Programs Manager for R&D and Public Affairs, said: "MOEMS is a promising multi feature technology for the miniaturisation of critical optical systems that will benefit society, consortium members and stakeholders by creating valuable knowledge based employment opportunities, increasing long term prosperity and enabling products that benefit society."
The pilot line for Lab4MEMS II will be housed in ST's 200mm fab in Agrate Brianza, with optical technologies added to the mix. Meanwhile, the project will also evaluate the potential benefits and impact of a move to 300mm wafers.
